TSMC Develops Innovative Coolant Recycling Technology to Enhance Resource Regeneration

TSMC is committed to driving a green, low-carbon supply chain and actively identifying opportunities for energy conservation and carbon reduction in its processes. To enhance resource recycling efficiency, TSMC has collaborated with suppliers to innovate and develop "Coolant Recycling Technology." This technology filters and purifies used refrigerant coolant which would otherwise be discarded, enabling it to be reused in semiconductor manufacturing processes. This approach not only reduces the volume of waste requiring external disposal but also decreases carbon emissions from the transportation of new coolant. In 2025 coolant recycling was successfully adopted by several of TSMC's 12-inch wafer fabs in Taiwan. Estimated annual carbon reduction is 40,000 metric tons per year, further expanding the value of TSMC's resource regeneration.

Harnessing Technology to Regenerate Resources, Giving Coolant New Life

Semiconductor manufacturing equipment generate a significant amount of heat that must be controlled through cooling systems to prevent overheating, which could affect equipment performance and process accuracy. Conventionally, when chillers are decommissioned, coolant is usually disposed of along with them. However, due to its high stability, coolant can retain its original properties even after long-term use. In response, TSMC collaborated with suppliers to invest in research on recycling technology. By conducting chemical and physical analyses, the performance differences between recycled coolant and new coolant were evaluated, and the feasibility of cyclical usage was verified. During the research process, coolant intended for disposal was extracted from the chiller, followed by multiple filtration and purification steps, parameter adjustments, and optimization. This approach minimized liquid loss and performance degradation during recycling, effectively ensuring the recovery rate and stable usability of the coolant.

TSMC follows the principles of "minimizing waste generation, maximizing resource recycling, and optimizing supplier management." By optimizing recycling technology to ensure effective economical resource circulation of coolants from different brands, this initiative adds new momentum into the semiconductor industry's journey toward a low-carbon future.