TSMC Regenerates Electronic-Grade Carbon Dioxide to Aid Green Transformation

Supply chain carbon management is integral to TSMC's net-zero emissions transition. Following collaboration with an ammonia supplier to introduce blue ammonia produced using Carbon Capture and Storage (CCS) technology, TSMC has partnered with a hydrogen peroxide supplier on carbon capture. This new initiative focuses on capturing and purifying tail gas emissions from the hydrogen peroxide production process, transforming them into electronic-grade carbon dioxide that meets semiconductor manufacturing quality standards, raising the value of resource circularity. In May 2026, the regenerated electronic-grade carbon dioxide from this collaboration was adopted at Fab 14B with an estimated annual carbon reduction of approximately 1,200 metric tons, strengthening the resilience of TSMC’s green supply chain. 

Recycling Tail Gas, Transforming into High-purity Electronic-grade Materials

Both hydrogen peroxide and electronic-grade carbon dioxide are crucial chemicals in semiconductor manufacturing. The upstream hydrogen production process, necessary for producing hydrogen peroxide, emits tail gas containing carbon dioxide. To enhance supply chain sustainability and put circular economy principles into practice, TSMC and its supplier jointly set plans to install a dedicated recovery pipeline system at the hydrogen plant. This system captures tail gas emitted after combustion or reaction, channels it into raw material storage tanks for centralized collection, and then uses adsorption-desorption towers to remove residual hydrogen. Next, a purification tower separates impurities and enhances purity, resulting in electronic-grade carbon dioxide.

To ensure that regenerated electronic-grade carbon dioxide meets the stringent high-purity standards required for semiconductor manufacturing, TSMC not only guided the supplier in establishing a comprehensive Certificate of Analysis (CoA) mechanism during the production phase to ensure each batch meets specifications, but also provided specialized technical support. This included assisting the supplier with tail gas composition analysis and purity testing, and guiding adjustments to operational parameters during the purification process to enhance separation efficiency and gas purity. TSMC also helped the supplier to optimize factory production line operations and tank truck purge standards to mitigate impurity risks, and conducted on-site audits to review production management processes, comprehensively improving the supplier's technical capabilities and quality control standards.

TSMC is committed to building a green and low-carbon supply chain. The Company estimates that after adopting regenerated electronic-grade carbon dioxide at Fab 15A and Fab 15B by the end of 2026, annual carbon emissions will be reduced by over 6,000 metric tons. Through stronger collaboration with suppliers, TSMC is fully committed to achieving its net-zero emissions goal by taking action on the concept of resource recycling and reuse.

• What is circular economy?

An economic model that promotes resource circularity, thereby minimizing waste and reducing greenhouse gas emissions.

• What is United Nations Sustainable Development Goals (SDGs) Goal 12?

The 12 goals set forth by the United Nations urge collaborative efforts from governments, industries, and academia worldwide to achieve sustainable development across social, economic, and environmental dimensions by the year 2030. SDGs 12 focuses on "ensure sustainable consumption and production patterns."