TSMC Collaborates with Supplier to Upgrade Filter Cleaning Methods to Reduce 2,580 Tons of Chemical Waste

Driving a green and low-carbon supply chain is one of TSMC's core strategies for practicing sustainable development. As advanced manufacturing processes evolve, demand for the chemical Tetramethyl Ammonium Hydroxide (TMAH) continues to rise. Addressing the challenge of increased filter consumption during the TMAH filtration process, TSMC has guided its supplier to upgrade filter cleaning methods. These upgrades have not only successfully prolonged filter lifetimes but also reduced waste chemical discharge. As of July 2025, this effort has resulted in average annual savings of 431 filter units and reduced waste chemical discharge by 2,580 tons, further promoting environmentally friendly practices and green manufacturing capabilities.

Enhancing Filter Cleanliness to Achieve Breakthroughs in Filter Performance

TMAH is the most widely used chemical in the semiconductor photolithography process. To meet the stringent high-purity requirements of advanced processes, filtration performance needs to be improved. To enhance the filtration performance, TSMC collaborated with supplier to improve the filter cleaning process. This method not only enhance filter cleanliness but also reduce waste chemical discharge. As a result, the solution significantly reduces waste chemical discharge and achieves the dual benefits of extended lifetime and environmental sustainability. To validate the effectiveness of the new cleaning method, TSMC further analyzed the impurity content of the filter after cleaning, results indicated that the cleanliness of the filters significantly improved after the cleaning enhancements and demonstrated a positive correlation with TMAH quality indicators, demonstrating outstanding cleaning performance.

Following the principles of "minimizing waste chemical generation, maximizing resource recycling, and optimizing supplier management," TSMC has collaborated with suppliers to develop electronic-grade TMAH to enhance recycling rates. Additionally, the Company has improved the efficiency of TMAH filter cleaning methods and is actively evaluating ways to extend this filter cleaning method to other chemicals. TSMC continues to collaborate with suppliers to enhance technology quality, reduce resource consumption, and deepen its commitment to sustainable environmental development.