TSMC's Facility System Energy-saving Action Creates Innovation Again, Saving 6.5 Million kWh of Electricity and Reducing 3,300 Metric Tons of Carbon Emissions

Improving energy efficiency is a key strategy for TSMC to enhance our climate resilience. To achieve our commitment to net-zero emissions by 2050, TSMC actively creates more opportunities for energy conservation and carbon reduction. TSMC collaborated with suppliers to improve the cooling mechanism of the Compressed Dry Air (CDA) system and use recycled warm water to pre-cool CDA, resulting in an 80% reduction in chilled water usage and significant energy savings. As of June 2023, this technology has been implemented in the Fab 18 Phase 4 manufacturing facility, saving 6.5 million kWh of electricity and reducing 3,300 metric tons of carbon emissions. The Fab 12 Phase 8, Fab 18 Phases 5 and 6, and Advanced Backend Fab 6A facilities are currently also implementing these improvements to enhance TSMC's capabilities in green operations.

Recycling Warm Water instead of Using Ice Water for Pre-cooling Raises Energy Efficiency

The CDA system is composed of air compressors, storage tank, dryer, and filter. Its main function is to compress, dehumidify and filter the air before sending it to the clean room. In the past, the front, middle, and rear heat exchangers of the air compressor were cooled by 12℃ chilled water supplied by the chilled water system. To improve the system’s operating efficiency, TSMC collaborated with suppliers to launch the "Compressed Dry Air System Cooling Mechanism Improvement Project" in 2020, which evaluated changes in air compressor design and the temperature stability of air supply. After many tests and modifications, TSMC found a way to effectively reduce loading on the chilled water system and increase energy efficiency by using 28-30℃ recycled warm water instead of 12℃ chilled water to pre-cool the front and middle heat exchangers of the air compressor, and maintaining 12℃ chilled water for the rear heat exchanger to control air temperature, the pre-cooled warm water can also be used for preheating and reheating coils in the Makeup Air Handling Unit (MAU) for maximizing resource utilization.

In response to United Nations Sustainable Development Goal No.7, TSMC continues to expand its energy-saving initiatives. The improved CDA system will be included as a standard design for new factories, and is expected to be implemented in Fab 14 Phase 8, Fab 18 Phases 7 and 8, and Advanced Backend Fab 6B by 2024. TSMC estimates this will save 40 million kWh of electricity and reduce 20,360 metric tons of carbon emissions annually, which is equivalent to the carbon absorption of 52.6 Taipei Da-An Forest Parks. TSMC continues to pursue green innovation and strives towards a sustainable future.